Bronkhorst质量流量计

? ACCURACY (ATCALIBRATIONUNDEROPERATINGCONDITIONS) Standard 3F-Calibration: ±0.8% of reading plus ±0.2% of full scale Polynomial calibration: ±0.5% of reading ?plus ±0.1% of full scale REPRODUCIBILITY < 0.1% full scale REPEATABILITY < 0.2% of reading RESPONSETIME 1...2 sec. (faster on request) CONTROL STABILITY < ±0.1% full scale (typical for 1 ln/min N2) PRESSURE SENSITIVITY 0.1%/bar typ. N2 0.01%/bar typ. H2 ATTITUDE SENSITIVITY max. error 0.015% at 1 bar N2and 90°change VIBRATION SENSITIVITY negligible TEMPERATURE SENSITIVITY zero point approx. 0.05% of full scale/°C SUPPLY VOLTAGE SENSITIVITY zero at correct supply voltages (acc. to electr. data) CONTROLVALVE closes automatically at setpoint < 1% LEAKINTEGRITY tested < 2 x 10-9mbar l/s He RF CE approved design MECHANICALPARTS PROCESSCONNECTIONS see model number code; other on application MATERIAL SOFCONSTRUCTION stainless steel AISI 316L or comparable SEALS Viton, EPDM, elast. PTFE, other on application SURFACE QUALITY Ra 0.2...0.6 ?m OPERATING LIMITS RANGE 2%...100% TYPESOFGASES all gases compatible with AISI 316L TEMPERATURE -10 °C up to +70 °C WARMING-UPTIME 30 min. for optimum accuracy, 2 min. for accuracy ±2% of full scale ELECTRICAL PROPERTIES SUPPLY VOLTAGE mass flow meter +15 V...24 V, 50 mA mass flow controller +15 V, 250 mA -15 V, 30 mA mass flow controller +24 V, 190 mA OUTPUT SIGNAL 0...5 V, 0...10 V, 4…20mA SETPOINT SIGNAL 0...5 V, 0...10 V, 4…20mA ELECTRICAL CONNECTION 9-pin sub-D connector, cable length independent

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