*小检测浓度:
杂 质 |
H2 |
O2 |
N2 |
CO |
CO2 |
CH4 |
×10-6V/V |
≤0.1 |
≤0.1 |
≤0.5 |
≤0.1 |
≤0.2 |
≤0.1 |